| Model NO.: | Pbn heaters and electrostatic chucks44704 |
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| Manufacure Name: | Momentive performance ( earstwhile ge) |
| Customization: | Available Customized Request |
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Innovative growth enterprises
Momentives pyrolytic boron nitride (pbn) heaters and electrostatic chucks (e-chucks) combine the unique electrical, chemical, and thermal properties of pbn, a dielectric material, and pyrolytic graphite (pg), an electrical conductor, to produce a truly advanced system. these non-brittle refractory materials owe their exceptional purity to the high-temperature chemical vapor deposition (cvd) production method. the high thermal conductivity and anisotropy of both materials result in excellent thermal uniformity.
